9/12/2011	12:31:46 AM	H2 valve closed
9/12/2011	12:31:46 AM	BCl3 valve closed
9/12/2011	12:31:46 AM	PH3 valve closed
9/12/2011	12:31:46 AM	SiCl4 pre valve closed
9/12/2011	12:31:46 AM	SiCl4 post valve closed
9/12/2011	12:31:46 AM	Main Vac valve closed
9/12/2011	12:31:46 AM	Bypass valve closed
9/12/2011	12:31:46 AM	Bubbler valve closed
9/12/2011	12:31:46 AM	Helium valve opened
9/12/2011	12:31:46 AM	Helium MFC set to  500.000000
9/12/2011	12:31:46 AM	H2 MFC set to  0.000000
9/12/2011	12:31:46 AM	BCl3 MFC set to  0.000000
9/12/2011	12:31:46 AM	PHl3 MFC set to  0.000000
9/12/2011	12:31:46 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:31:46 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:31:46 AM	Tube furnace set to 0
9/12/2011	12:31:52 AM	H2 valve closed
9/12/2011	12:31:52 AM	BCl3 valve closed
9/12/2011	12:31:52 AM	PH3 valve closed
9/12/2011	12:31:52 AM	SiCl4 pre valve closed
9/12/2011	12:31:52 AM	SiCl4 post valve closed
9/12/2011	12:31:52 AM	Main Vac valve closed
9/12/2011	12:31:52 AM	Bypass valve closed
9/12/2011	12:31:52 AM	Helium valve opened
9/12/2011	12:31:52 AM	Bubbler valve opened
9/12/2011	12:31:52 AM	Helium MFC set to  500.000000
9/12/2011	12:31:52 AM	H2 MFC set to  0.000000
9/12/2011	12:31:52 AM	BCl3 MFC set to  0.000000
9/12/2011	12:31:52 AM	PHl3 MFC set to  0.000000
9/12/2011	12:31:52 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:31:52 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:31:52 AM	Tube furnace set to 0
9/12/2011	12:36:52 AM	Helium valve closed
9/12/2011	12:36:52 AM	H2 valve closed
9/12/2011	12:36:52 AM	BCl3 valve closed
9/12/2011	12:36:52 AM	PH3 valve closed
9/12/2011	12:36:52 AM	SiCl4 pre valve closed
9/12/2011	12:36:52 AM	SiCl4 post valve closed
9/12/2011	12:36:52 AM	Main Vac valve closed
9/12/2011	12:36:52 AM	Bypass valve closed
9/12/2011	12:36:52 AM	Bubbler valve closed
9/12/2011	12:36:52 AM	Helium MFC set to  0.000000
9/12/2011	12:36:52 AM	H2 MFC set to  0.000000
9/12/2011	12:36:52 AM	BCl3 MFC set to  0.000000
9/12/2011	12:36:52 AM	PHl3 MFC set to  0.000000
9/12/2011	12:36:52 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:36:52 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:36:52 AM	Tube furnace set to 0
9/12/2011	12:36:53 AM	Helium valve closed
9/12/2011	12:36:53 AM	H2 valve closed
9/12/2011	12:36:53 AM	BCl3 valve closed
9/12/2011	12:36:53 AM	PH3 valve closed
9/12/2011	12:36:53 AM	SiCl4 pre valve closed
9/12/2011	12:36:53 AM	SiCl4 post valve closed
9/12/2011	12:36:53 AM	Main Vac valve closed
9/12/2011	12:36:53 AM	Bubbler valve closed
9/12/2011	12:36:53 AM	Bypass valve opened
9/12/2011	12:36:53 AM	Helium MFC set to  0.000000
9/12/2011	12:36:53 AM	H2 MFC set to  0.000000
9/12/2011	12:36:53 AM	BCl3 MFC set to  0.000000
9/12/2011	12:36:53 AM	PHl3 MFC set to  0.000000
9/12/2011	12:36:53 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:36:53 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:36:53 AM	Tube furnace set to 0
9/12/2011	12:37:44 AM	Helium valve closed
9/12/2011	12:37:44 AM	H2 valve closed
9/12/2011	12:37:44 AM	BCl3 valve closed
9/12/2011	12:37:44 AM	PH3 valve closed
9/12/2011	12:37:44 AM	SiCl4 pre valve closed
9/12/2011	12:37:44 AM	SiCl4 post valve closed
9/12/2011	12:37:44 AM	Main Vac valve closed
9/12/2011	12:37:44 AM	Bubbler valve closed
9/12/2011	12:37:44 AM	Bypass valve opened
9/12/2011	12:37:44 AM	Helium MFC set to  0.000000
9/12/2011	12:37:44 AM	H2 MFC set to  0.000000
9/12/2011	12:37:44 AM	BCl3 MFC set to  0.000000
9/12/2011	12:37:44 AM	PHl3 MFC set to  0.000000
9/12/2011	12:37:44 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:37:44 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:37:44 AM	Tube furnace set to 0
9/12/2011	12:38:44 AM	Helium valve closed
9/12/2011	12:38:44 AM	H2 valve closed
9/12/2011	12:38:44 AM	BCl3 valve closed
9/12/2011	12:38:44 AM	PH3 valve closed
9/12/2011	12:38:44 AM	SiCl4 pre valve closed
9/12/2011	12:38:44 AM	SiCl4 post valve closed
9/12/2011	12:38:44 AM	Bypass valve closed
9/12/2011	12:38:44 AM	Bubbler valve closed
9/12/2011	12:38:44 AM	Main Vac valve opened
9/12/2011	12:38:44 AM	Helium MFC set to  0.000000
9/12/2011	12:38:44 AM	H2 MFC set to  0.000000
9/12/2011	12:38:44 AM	BCl3 MFC set to  0.000000
9/12/2011	12:38:44 AM	PHl3 MFC set to  0.000000
9/12/2011	12:38:44 AM	SiCl4 MFC set to  0.000000
9/12/2011	12:38:44 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	12:38:44 AM	Tube furnace set to 0
9/12/2011	1:13:52 AM	Run aborted at 1:13 AM
9/12/2011	1:13:52 AM	Helium valve closed
9/12/2011	1:13:52 AM	H2 valve closed
9/12/2011	1:13:52 AM	BCl3 valve closed
9/12/2011	1:13:52 AM	PH3 valve closed
9/12/2011	1:13:52 AM	SiCl4 pre valve closed
9/12/2011	1:13:52 AM	SiCl4 post valve closed
9/12/2011	1:13:52 AM	Bypass valve closed
9/12/2011	1:13:52 AM	Main Vac valve closed
9/12/2011	1:13:52 AM	Bubbler valve closed
9/12/2011	1:13:52 AM	Helium MFC set to  0.000000
9/12/2011	1:13:52 AM	H2 MFC set to  0.000000
9/12/2011	1:13:52 AM	BCl3 MFC set to  0.000000
9/12/2011	1:13:52 AM	PHl3 MFC set to  0.000000
9/12/2011	1:13:52 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:13:52 AM	Tube furnace set to 0
9/12/2011	1:13:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2011	1:14:00 AM	Recipe started at 1:14 AM
9/12/2011	1:14:00 AM	Helium valve closed
9/12/2011	1:14:00 AM	H2 valve closed
9/12/2011	1:14:00 AM	BCl3 valve closed
9/12/2011	1:14:00 AM	PH3 valve closed
9/12/2011	1:14:00 AM	SiCl4 pre valve closed
9/12/2011	1:14:00 AM	SiCl4 post valve closed
9/12/2011	1:14:00 AM	Main Vac valve closed
9/12/2011	1:14:00 AM	Bypass valve closed
9/12/2011	1:14:00 AM	Bubbler valve closed
9/12/2011	1:14:00 AM	Helium MFC set to  0.000000
9/12/2011	1:14:00 AM	H2 MFC set to  0.000000
9/12/2011	1:14:00 AM	BCl3 MFC set to  0.000000
9/12/2011	1:14:00 AM	PHl3 MFC set to  0.000000
9/12/2011	1:14:00 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:14:00 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:14:00 AM	Tube furnace set to 0
9/12/2011	1:14:03 AM	H2 valve closed
9/12/2011	1:14:03 AM	BCl3 valve closed
9/12/2011	1:14:03 AM	PH3 valve closed
9/12/2011	1:14:03 AM	SiCl4 pre valve closed
9/12/2011	1:14:03 AM	SiCl4 post valve closed
9/12/2011	1:14:03 AM	Main Vac valve closed
9/12/2011	1:14:04 AM	Bypass valve closed
9/12/2011	1:14:04 AM	Bubbler valve closed
9/12/2011	1:14:04 AM	Helium valve opened
9/12/2011	1:14:04 AM	Helium MFC set to  500.000000
9/12/2011	1:14:04 AM	H2 MFC set to  0.000000
9/12/2011	1:14:04 AM	BCl3 MFC set to  0.000000
9/12/2011	1:14:04 AM	PHl3 MFC set to  0.000000
9/12/2011	1:14:04 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:14:04 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:14:04 AM	Tube furnace set to 0
9/12/2011	1:15:04 AM	Helium valve closed
9/12/2011	1:15:04 AM	H2 valve closed
9/12/2011	1:15:04 AM	BCl3 valve closed
9/12/2011	1:15:04 AM	PH3 valve closed
9/12/2011	1:15:04 AM	SiCl4 pre valve closed
9/12/2011	1:15:04 AM	SiCl4 post valve closed
9/12/2011	1:15:04 AM	Main Vac valve closed
9/12/2011	1:15:04 AM	Bypass valve closed
9/12/2011	1:15:04 AM	Bubbler valve closed
9/12/2011	1:15:04 AM	Helium MFC set to  0.000000
9/12/2011	1:15:04 AM	H2 MFC set to  0.000000
9/12/2011	1:15:04 AM	BCl3 MFC set to  0.000000
9/12/2011	1:15:04 AM	PHl3 MFC set to  0.000000
9/12/2011	1:15:04 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:15:04 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:15:05 AM	Tube furnace set to 0
9/12/2011	1:15:06 AM	Run finished at 1:15 AM
9/12/2011	1:15:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/12/2011	1:15:15 AM	Helium MFC set to  500.000000
9/12/2011	1:15:16 AM	Helium valve opened
9/12/2011	1:15:19 AM	Bubbler valve opened
9/12/2011	1:20:02 AM	Bubbler valve closed
9/12/2011	1:20:02 AM	Helium valve closed
9/12/2011	1:20:06 AM	Helium MFC set to  0.000000
9/12/2011	1:21:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/12/2011	1:21:45 AM	Recipe started at 1:21 AM
9/12/2011	1:21:45 AM	Helium valve closed
9/12/2011	1:21:45 AM	H2 valve closed
9/12/2011	1:21:45 AM	BCl3 valve closed
9/12/2011	1:21:45 AM	PH3 valve closed
9/12/2011	1:21:45 AM	SiCl4 pre valve closed
9/12/2011	1:21:45 AM	SiCl4 post valve closed
9/12/2011	1:21:45 AM	Main Vac valve closed
9/12/2011	1:21:45 AM	Bubbler valve closed
9/12/2011	1:21:45 AM	Bypass valve opened
9/12/2011	1:21:45 AM	Helium MFC set to  0.000000
9/12/2011	1:21:45 AM	H2 MFC set to  0.000000
9/12/2011	1:21:45 AM	BCl3 MFC set to  0.000000
9/12/2011	1:21:45 AM	PHl3 MFC set to  0.000000
9/12/2011	1:21:45 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:21:45 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:21:45 AM	Tube furnace set to 0
9/12/2011	1:22:42 AM	Helium valve closed
9/12/2011	1:22:42 AM	H2 valve closed
9/12/2011	1:22:42 AM	BCl3 valve closed
9/12/2011	1:22:42 AM	PH3 valve closed
9/12/2011	1:22:42 AM	SiCl4 pre valve closed
9/12/2011	1:22:42 AM	SiCl4 post valve closed
9/12/2011	1:22:42 AM	Main Vac valve closed
9/12/2011	1:22:42 AM	Bubbler valve closed
9/12/2011	1:22:42 AM	Bypass valve opened
9/12/2011	1:22:42 AM	Helium MFC set to  0.000000
9/12/2011	1:22:42 AM	H2 MFC set to  0.000000
9/12/2011	1:22:42 AM	BCl3 MFC set to  0.000000
9/12/2011	1:22:42 AM	PHl3 MFC set to  0.000000
9/12/2011	1:22:42 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:22:42 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:22:42 AM	Tube furnace set to 0
9/12/2011	1:23:12 AM	Helium valve closed
9/12/2011	1:23:12 AM	H2 valve closed
9/12/2011	1:23:12 AM	BCl3 valve closed
9/12/2011	1:23:12 AM	PH3 valve closed
9/12/2011	1:23:12 AM	SiCl4 pre valve closed
9/12/2011	1:23:12 AM	SiCl4 post valve closed
9/12/2011	1:23:12 AM	Bypass valve closed
9/12/2011	1:23:12 AM	Bubbler valve closed
9/12/2011	1:23:12 AM	Main Vac valve opened
9/12/2011	1:23:12 AM	Helium MFC set to  0.000000
9/12/2011	1:23:12 AM	H2 MFC set to  0.000000
9/12/2011	1:23:12 AM	BCl3 MFC set to  0.000000
9/12/2011	1:23:12 AM	PHl3 MFC set to  0.000000
9/12/2011	1:23:12 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:23:12 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:23:13 AM	Tube furnace set to 0
9/12/2011	1:23:43 AM	H2 valve closed
9/12/2011	1:23:43 AM	BCl3 valve closed
9/12/2011	1:23:43 AM	PH3 valve closed
9/12/2011	1:23:43 AM	SiCl4 pre valve closed
9/12/2011	1:23:43 AM	SiCl4 post valve closed
9/12/2011	1:23:43 AM	Bypass valve closed
9/12/2011	1:23:43 AM	Bubbler valve closed
9/12/2011	1:23:43 AM	Helium valve opened
9/12/2011	1:23:43 AM	Main Vac valve opened
9/12/2011	1:23:43 AM	Helium MFC set to  20.000000
9/12/2011	1:23:43 AM	H2 MFC set to  0.000000
9/12/2011	1:23:43 AM	BCl3 MFC set to  0.000000
9/12/2011	1:23:43 AM	PHl3 MFC set to  0.000000
9/12/2011	1:23:43 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:23:43 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:23:43 AM	Tube furnace set to 0
9/12/2011	1:24:13 AM	Helium valve closed
9/12/2011	1:24:13 AM	H2 valve closed
9/12/2011	1:24:13 AM	BCl3 valve closed
9/12/2011	1:24:13 AM	PH3 valve closed
9/12/2011	1:24:13 AM	SiCl4 pre valve closed
9/12/2011	1:24:13 AM	SiCl4 post valve closed
9/12/2011	1:24:13 AM	Bypass valve closed
9/12/2011	1:24:13 AM	Bubbler valve closed
9/12/2011	1:24:13 AM	Main Vac valve opened
9/12/2011	1:24:13 AM	Helium MFC set to  0.000000
9/12/2011	1:24:13 AM	H2 MFC set to  0.000000
9/12/2011	1:24:13 AM	BCl3 MFC set to  0.000000
9/12/2011	1:24:13 AM	PHl3 MFC set to  0.000000
9/12/2011	1:24:13 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:24:13 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:24:13 AM	Tube furnace set to 0
9/12/2011	1:24:43 AM	H2 valve closed
9/12/2011	1:24:43 AM	BCl3 valve closed
9/12/2011	1:24:43 AM	PH3 valve closed
9/12/2011	1:24:43 AM	SiCl4 pre valve closed
9/12/2011	1:24:43 AM	SiCl4 post valve closed
9/12/2011	1:24:43 AM	Bypass valve closed
9/12/2011	1:24:43 AM	Bubbler valve closed
9/12/2011	1:24:43 AM	Helium valve opened
9/12/2011	1:24:43 AM	Main Vac valve opened
9/12/2011	1:24:43 AM	Helium MFC set to  20.000000
9/12/2011	1:24:43 AM	H2 MFC set to  0.000000
9/12/2011	1:24:43 AM	BCl3 MFC set to  0.000000
9/12/2011	1:24:43 AM	PHl3 MFC set to  0.000000
9/12/2011	1:24:43 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:24:43 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:24:43 AM	Tube furnace set to 0
9/12/2011	1:25:13 AM	Helium valve closed
9/12/2011	1:25:13 AM	H2 valve closed
9/12/2011	1:25:13 AM	BCl3 valve closed
9/12/2011	1:25:13 AM	PH3 valve closed
9/12/2011	1:25:13 AM	SiCl4 pre valve closed
9/12/2011	1:25:13 AM	SiCl4 post valve closed
9/12/2011	1:25:13 AM	Bypass valve closed
9/12/2011	1:25:13 AM	Bubbler valve closed
9/12/2011	1:25:13 AM	Main Vac valve opened
9/12/2011	1:25:13 AM	Helium MFC set to  0.000000
9/12/2011	1:25:13 AM	H2 MFC set to  0.000000
9/12/2011	1:25:13 AM	BCl3 MFC set to  0.000000
9/12/2011	1:25:13 AM	PHl3 MFC set to  0.000000
9/12/2011	1:25:13 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:25:13 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:25:13 AM	Tube furnace set to 0
9/12/2011	1:25:35 AM	Run aborted at 1:25 AM
9/12/2011	1:25:35 AM	Helium valve closed
9/12/2011	1:25:35 AM	H2 valve closed
9/12/2011	1:25:35 AM	BCl3 valve closed
9/12/2011	1:25:35 AM	PH3 valve closed
9/12/2011	1:25:35 AM	SiCl4 pre valve closed
9/12/2011	1:25:35 AM	SiCl4 post valve closed
9/12/2011	1:25:35 AM	Bypass valve closed
9/12/2011	1:25:35 AM	Main Vac valve closed
9/12/2011	1:25:35 AM	Bubbler valve closed
9/12/2011	1:25:35 AM	Helium MFC set to  0.000000
9/12/2011	1:25:35 AM	H2 MFC set to  0.000000
9/12/2011	1:25:35 AM	BCl3 MFC set to  0.000000
9/12/2011	1:25:35 AM	PHl3 MFC set to  0.000000
9/12/2011	1:25:35 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:25:35 AM	Tube furnace set to 0
9/12/2011	1:25:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/12/2011	1:25:38 AM	Main Vac valve opened
9/12/2011	1:31:08 AM	Main Vac valve closed
9/12/2011	1:31:13 AM	Main Vac valve opened
9/12/2011	1:31:42 AM	Recipe started at 1:31 AM
9/12/2011	1:31:42 AM	Helium valve closed
9/12/2011	1:31:42 AM	H2 valve closed
9/12/2011	1:31:42 AM	BCl3 valve closed
9/12/2011	1:31:42 AM	PH3 valve closed
9/12/2011	1:31:42 AM	SiCl4 pre valve closed
9/12/2011	1:31:42 AM	SiCl4 post valve closed
9/12/2011	1:31:42 AM	Bypass valve closed
9/12/2011	1:31:42 AM	Bubbler valve closed
9/12/2011	1:31:42 AM	Main Vac valve opened
9/12/2011	1:31:42 AM	Helium MFC set to  0.000000
9/12/2011	1:31:42 AM	H2 MFC set to  0.000000
9/12/2011	1:31:42 AM	BCl3 MFC set to  0.000000
9/12/2011	1:31:42 AM	PHl3 MFC set to  0.000000
9/12/2011	1:31:42 AM	SiCl4 MFC set to  0.000000
9/12/2011	1:31:42 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	1:31:43 AM	Tube furnace set to 180
9/12/2011	2:31:43 AM	H2 valve closed
9/12/2011	2:31:43 AM	BCl3 valve closed
9/12/2011	2:31:43 AM	PH3 valve closed
9/12/2011	2:31:43 AM	SiCl4 pre valve closed
9/12/2011	2:31:43 AM	SiCl4 post valve closed
9/12/2011	2:31:43 AM	Bypass valve closed
9/12/2011	2:31:43 AM	Bubbler valve closed
9/12/2011	2:31:43 AM	Helium valve opened
9/12/2011	2:31:43 AM	Main Vac valve opened
9/12/2011	2:31:43 AM	Helium MFC set to  10.000000
9/12/2011	2:31:43 AM	H2 MFC set to  0.000000
9/12/2011	2:31:43 AM	BCl3 MFC set to  0.000000
9/12/2011	2:31:43 AM	PHl3 MFC set to  0.000000
9/12/2011	2:31:43 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:31:43 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:31:43 AM	Tube furnace set to 180
9/12/2011	2:32:13 AM	Helium valve closed
9/12/2011	2:32:13 AM	H2 valve closed
9/12/2011	2:32:13 AM	BCl3 valve closed
9/12/2011	2:32:13 AM	PH3 valve closed
9/12/2011	2:32:13 AM	SiCl4 pre valve closed
9/12/2011	2:32:13 AM	SiCl4 post valve closed
9/12/2011	2:32:13 AM	Bypass valve closed
9/12/2011	2:32:13 AM	Bubbler valve closed
9/12/2011	2:32:13 AM	Main Vac valve opened
9/12/2011	2:32:13 AM	Helium MFC set to  0.000000
9/12/2011	2:32:13 AM	H2 MFC set to  0.000000
9/12/2011	2:32:13 AM	BCl3 MFC set to  0.000000
9/12/2011	2:32:13 AM	PHl3 MFC set to  0.000000
9/12/2011	2:32:13 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:32:13 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:32:13 AM	Tube furnace set to 180
9/12/2011	2:32:43 AM	H2 valve closed
9/12/2011	2:32:43 AM	BCl3 valve closed
9/12/2011	2:32:43 AM	PH3 valve closed
9/12/2011	2:32:43 AM	SiCl4 pre valve closed
9/12/2011	2:32:43 AM	SiCl4 post valve closed
9/12/2011	2:32:43 AM	Bypass valve closed
9/12/2011	2:32:43 AM	Bubbler valve closed
9/12/2011	2:32:43 AM	Helium valve opened
9/12/2011	2:32:43 AM	Main Vac valve opened
9/12/2011	2:32:43 AM	Helium MFC set to  10.000000
9/12/2011	2:32:43 AM	H2 MFC set to  0.000000
9/12/2011	2:32:43 AM	BCl3 MFC set to  0.000000
9/12/2011	2:32:43 AM	PHl3 MFC set to  0.000000
9/12/2011	2:32:43 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:32:43 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:32:43 AM	Tube furnace set to 180
9/12/2011	2:33:13 AM	Helium valve closed
9/12/2011	2:33:13 AM	H2 valve closed
9/12/2011	2:33:13 AM	BCl3 valve closed
9/12/2011	2:33:13 AM	PH3 valve closed
9/12/2011	2:33:13 AM	SiCl4 pre valve closed
9/12/2011	2:33:13 AM	SiCl4 post valve closed
9/12/2011	2:33:13 AM	Bypass valve closed
9/12/2011	2:33:13 AM	Bubbler valve closed
9/12/2011	2:33:13 AM	Main Vac valve opened
9/12/2011	2:33:13 AM	Helium MFC set to  0.000000
9/12/2011	2:33:13 AM	H2 MFC set to  0.000000
9/12/2011	2:33:13 AM	BCl3 MFC set to  0.000000
9/12/2011	2:33:13 AM	PHl3 MFC set to  0.000000
9/12/2011	2:33:13 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:33:13 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:33:13 AM	Tube furnace set to 180
9/12/2011	2:35:13 AM	Helium valve closed
9/12/2011	2:35:13 AM	BCl3 valve closed
9/12/2011	2:35:13 AM	PH3 valve closed
9/12/2011	2:35:13 AM	SiCl4 pre valve closed
9/12/2011	2:35:13 AM	SiCl4 post valve closed
9/12/2011	2:35:13 AM	Main Vac valve closed
9/12/2011	2:35:13 AM	Bypass valve closed
9/12/2011	2:35:13 AM	Bubbler valve closed
9/12/2011	2:35:13 AM	H2 valve opened
9/12/2011	2:35:13 AM	Helium MFC set to  0.000000
9/12/2011	2:35:13 AM	H2 MFC set to  500.000000
9/12/2011	2:35:13 AM	BCl3 MFC set to  0.000000
9/12/2011	2:35:13 AM	PHl3 MFC set to  0.000000
9/12/2011	2:35:13 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:35:13 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:35:14 AM	Tube furnace set to 1000
9/12/2011	2:36:17 AM	Helium valve closed
9/12/2011	2:36:17 AM	BCl3 valve closed
9/12/2011	2:36:17 AM	PH3 valve closed
9/12/2011	2:36:17 AM	SiCl4 pre valve closed
9/12/2011	2:36:17 AM	SiCl4 post valve closed
9/12/2011	2:36:17 AM	Main Vac valve closed
9/12/2011	2:36:17 AM	Bypass valve closed
9/12/2011	2:36:17 AM	H2 valve opened
9/12/2011	2:36:17 AM	Bubbler valve opened
9/12/2011	2:36:17 AM	Helium MFC set to  0.000000
9/12/2011	2:36:17 AM	H2 MFC set to  500.000000
9/12/2011	2:36:17 AM	BCl3 MFC set to  0.000000
9/12/2011	2:36:17 AM	PHl3 MFC set to  0.000000
9/12/2011	2:36:17 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:36:17 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:36:17 AM	Tube furnace set to 1000
9/12/2011	2:36:19 AM	Helium valve closed
9/12/2011	2:36:19 AM	BCl3 valve closed
9/12/2011	2:36:19 AM	PH3 valve closed
9/12/2011	2:36:19 AM	SiCl4 pre valve closed
9/12/2011	2:36:19 AM	SiCl4 post valve closed
9/12/2011	2:36:19 AM	Main Vac valve closed
9/12/2011	2:36:19 AM	Bypass valve closed
9/12/2011	2:36:19 AM	H2 valve opened
9/12/2011	2:36:19 AM	Bubbler valve opened
9/12/2011	2:36:19 AM	Helium MFC set to  0.000000
9/12/2011	2:36:19 AM	H2 MFC set to  500.000000
9/12/2011	2:36:19 AM	BCl3 MFC set to  0.000000
9/12/2011	2:36:19 AM	PHl3 MFC set to  0.000000
9/12/2011	2:36:19 AM	SiCl4 MFC set to  0.000000
9/12/2011	2:36:19 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:36:19 AM	Tube furnace set to 1000
9/12/2011	2:56:19 AM	Helium valve closed
9/12/2011	2:56:19 AM	PH3 valve closed
9/12/2011	2:56:19 AM	Main Vac valve closed
9/12/2011	2:56:19 AM	Bypass valve closed
9/12/2011	2:56:19 AM	H2 valve opened
9/12/2011	2:56:19 AM	BCl3 valve opened
9/12/2011	2:56:19 AM	SiCl4 pre valve opened
9/12/2011	2:56:19 AM	SiCl4 post valve opened
9/12/2011	2:56:19 AM	Bubbler valve opened
9/12/2011	2:56:19 AM	Helium MFC set to  0.000000
9/12/2011	2:56:19 AM	H2 MFC set to  500.000000
9/12/2011	2:56:19 AM	BCl3 MFC set to  2.500000
9/12/2011	2:56:19 AM	PHl3 MFC set to  0.000000
9/12/2011	2:56:19 AM	SiCl4 MFC set to  50.000000
9/12/2011	2:56:19 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	2:56:19 AM	Tube furnace set to 1000
9/12/2011	3:08:19 AM	Helium valve closed
9/12/2011	3:08:19 AM	BCl3 valve closed
9/12/2011	3:08:19 AM	PH3 valve closed
9/12/2011	3:08:19 AM	SiCl4 pre valve closed
9/12/2011	3:08:19 AM	SiCl4 post valve closed
9/12/2011	3:08:19 AM	Main Vac valve closed
9/12/2011	3:08:19 AM	Bypass valve closed
9/12/2011	3:08:19 AM	H2 valve opened
9/12/2011	3:08:19 AM	Bubbler valve opened
9/12/2011	3:08:19 AM	Helium MFC set to  0.000000
9/12/2011	3:08:19 AM	H2 MFC set to  500.000000
9/12/2011	3:08:19 AM	BCl3 MFC set to  0.000000
9/12/2011	3:08:19 AM	PHl3 MFC set to  0.000000
9/12/2011	3:08:19 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:08:19 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:08:19 AM	Tube furnace set to 975
9/12/2011	3:09:49 AM	Helium valve closed
9/12/2011	3:09:49 AM	BCl3 valve closed
9/12/2011	3:09:49 AM	PH3 valve closed
9/12/2011	3:09:49 AM	SiCl4 pre valve closed
9/12/2011	3:09:49 AM	SiCl4 post valve closed
9/12/2011	3:09:49 AM	Main Vac valve closed
9/12/2011	3:09:49 AM	Bypass valve closed
9/12/2011	3:09:49 AM	H2 valve opened
9/12/2011	3:09:49 AM	Bubbler valve opened
9/12/2011	3:09:49 AM	Helium MFC set to  0.000000
9/12/2011	3:09:49 AM	H2 MFC set to  500.000000
9/12/2011	3:09:49 AM	BCl3 MFC set to  0.000000
9/12/2011	3:09:49 AM	PHl3 MFC set to  0.000000
9/12/2011	3:09:49 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:09:49 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:09:49 AM	Tube furnace set to 950
9/12/2011	3:11:19 AM	Helium valve closed
9/12/2011	3:11:19 AM	BCl3 valve closed
9/12/2011	3:11:19 AM	PH3 valve closed
9/12/2011	3:11:19 AM	SiCl4 pre valve closed
9/12/2011	3:11:19 AM	SiCl4 post valve closed
9/12/2011	3:11:19 AM	Main Vac valve closed
9/12/2011	3:11:19 AM	Bypass valve closed
9/12/2011	3:11:19 AM	H2 valve opened
9/12/2011	3:11:19 AM	Bubbler valve opened
9/12/2011	3:11:19 AM	Helium MFC set to  0.000000
9/12/2011	3:11:19 AM	H2 MFC set to  500.000000
9/12/2011	3:11:19 AM	BCl3 MFC set to  0.000000
9/12/2011	3:11:19 AM	PHl3 MFC set to  0.000000
9/12/2011	3:11:19 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:11:19 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:11:19 AM	Tube furnace set to 925
9/12/2011	3:12:49 AM	Helium valve closed
9/12/2011	3:12:49 AM	BCl3 valve closed
9/12/2011	3:12:49 AM	PH3 valve closed
9/12/2011	3:12:49 AM	SiCl4 pre valve closed
9/12/2011	3:12:49 AM	SiCl4 post valve closed
9/12/2011	3:12:49 AM	Main Vac valve closed
9/12/2011	3:12:49 AM	Bypass valve closed
9/12/2011	3:12:49 AM	H2 valve opened
9/12/2011	3:12:49 AM	Bubbler valve opened
9/12/2011	3:12:49 AM	Helium MFC set to  0.000000
9/12/2011	3:12:49 AM	H2 MFC set to  500.000000
9/12/2011	3:12:49 AM	BCl3 MFC set to  0.000000
9/12/2011	3:12:49 AM	PHl3 MFC set to  0.000000
9/12/2011	3:12:49 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:12:49 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:12:50 AM	Tube furnace set to 900
9/12/2011	3:14:20 AM	H2 valve closed
9/12/2011	3:14:20 AM	BCl3 valve closed
9/12/2011	3:14:20 AM	PH3 valve closed
9/12/2011	3:14:20 AM	SiCl4 pre valve closed
9/12/2011	3:14:20 AM	SiCl4 post valve closed
9/12/2011	3:14:20 AM	Main Vac valve closed
9/12/2011	3:14:20 AM	Bypass valve closed
9/12/2011	3:14:20 AM	Helium valve opened
9/12/2011	3:14:20 AM	Bubbler valve opened
9/12/2011	3:14:20 AM	Helium MFC set to  500.000000
9/12/2011	3:14:20 AM	H2 MFC set to  0.000000
9/12/2011	3:14:20 AM	BCl3 MFC set to  0.000000
9/12/2011	3:14:20 AM	PHl3 MFC set to  0.000000
9/12/2011	3:14:20 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:14:20 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:14:20 AM	Tube furnace set to 875
9/12/2011	3:15:50 AM	H2 valve closed
9/12/2011	3:15:50 AM	BCl3 valve closed
9/12/2011	3:15:50 AM	PH3 valve closed
9/12/2011	3:15:50 AM	SiCl4 pre valve closed
9/12/2011	3:15:50 AM	SiCl4 post valve closed
9/12/2011	3:15:50 AM	Main Vac valve closed
9/12/2011	3:15:50 AM	Bypass valve closed
9/12/2011	3:15:50 AM	Helium valve opened
9/12/2011	3:15:50 AM	Bubbler valve opened
9/12/2011	3:15:50 AM	Helium MFC set to  500.000000
9/12/2011	3:15:50 AM	H2 MFC set to  0.000000
9/12/2011	3:15:50 AM	BCl3 MFC set to  0.000000
9/12/2011	3:15:50 AM	PHl3 MFC set to  0.000000
9/12/2011	3:15:50 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:15:50 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:15:50 AM	Tube furnace set to 850
9/12/2011	3:17:20 AM	H2 valve closed
9/12/2011	3:17:20 AM	BCl3 valve closed
9/12/2011	3:17:20 AM	PH3 valve closed
9/12/2011	3:17:20 AM	SiCl4 pre valve closed
9/12/2011	3:17:20 AM	SiCl4 post valve closed
9/12/2011	3:17:20 AM	Main Vac valve closed
9/12/2011	3:17:20 AM	Bypass valve closed
9/12/2011	3:17:20 AM	Helium valve opened
9/12/2011	3:17:20 AM	Bubbler valve opened
9/12/2011	3:17:20 AM	Helium MFC set to  500.000000
9/12/2011	3:17:20 AM	H2 MFC set to  0.000000
9/12/2011	3:17:20 AM	BCl3 MFC set to  0.000000
9/12/2011	3:17:20 AM	PHl3 MFC set to  0.000000
9/12/2011	3:17:20 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:17:20 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:17:20 AM	Tube furnace set to 825
9/12/2011	3:18:50 AM	H2 valve closed
9/12/2011	3:18:50 AM	BCl3 valve closed
9/12/2011	3:18:50 AM	PH3 valve closed
9/12/2011	3:18:50 AM	SiCl4 pre valve closed
9/12/2011	3:18:50 AM	SiCl4 post valve closed
9/12/2011	3:18:50 AM	Main Vac valve closed
9/12/2011	3:18:50 AM	Bypass valve closed
9/12/2011	3:18:50 AM	Helium valve opened
9/12/2011	3:18:50 AM	Bubbler valve opened
9/12/2011	3:18:50 AM	Helium MFC set to  500.000000
9/12/2011	3:18:50 AM	H2 MFC set to  0.000000
9/12/2011	3:18:50 AM	BCl3 MFC set to  0.000000
9/12/2011	3:18:50 AM	PHl3 MFC set to  0.000000
9/12/2011	3:18:50 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:18:50 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:18:50 AM	Tube furnace set to 800
9/12/2011	3:20:20 AM	H2 valve closed
9/12/2011	3:20:20 AM	BCl3 valve closed
9/12/2011	3:20:20 AM	PH3 valve closed
9/12/2011	3:20:20 AM	SiCl4 pre valve closed
9/12/2011	3:20:20 AM	SiCl4 post valve closed
9/12/2011	3:20:20 AM	Main Vac valve closed
9/12/2011	3:20:20 AM	Bypass valve closed
9/12/2011	3:20:20 AM	Helium valve opened
9/12/2011	3:20:20 AM	Bubbler valve opened
9/12/2011	3:20:20 AM	Helium MFC set to  500.000000
9/12/2011	3:20:20 AM	H2 MFC set to  0.000000
9/12/2011	3:20:20 AM	BCl3 MFC set to  0.000000
9/12/2011	3:20:20 AM	PHl3 MFC set to  0.000000
9/12/2011	3:20:20 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:20:20 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:20:21 AM	Tube furnace set to 775
9/12/2011	3:21:51 AM	H2 valve closed
9/12/2011	3:21:51 AM	BCl3 valve closed
9/12/2011	3:21:51 AM	PH3 valve closed
9/12/2011	3:21:51 AM	SiCl4 pre valve closed
9/12/2011	3:21:51 AM	SiCl4 post valve closed
9/12/2011	3:21:51 AM	Main Vac valve closed
9/12/2011	3:21:51 AM	Bypass valve closed
9/12/2011	3:21:51 AM	Helium valve opened
9/12/2011	3:21:51 AM	Bubbler valve opened
9/12/2011	3:21:51 AM	Helium MFC set to  500.000000
9/12/2011	3:21:51 AM	H2 MFC set to  0.000000
9/12/2011	3:21:51 AM	BCl3 MFC set to  0.000000
9/12/2011	3:21:51 AM	PHl3 MFC set to  0.000000
9/12/2011	3:21:51 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:21:51 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:21:51 AM	Tube furnace set to 750
9/12/2011	3:23:21 AM	H2 valve closed
9/12/2011	3:23:21 AM	BCl3 valve closed
9/12/2011	3:23:21 AM	PH3 valve closed
9/12/2011	3:23:21 AM	SiCl4 pre valve closed
9/12/2011	3:23:21 AM	SiCl4 post valve closed
9/12/2011	3:23:21 AM	Main Vac valve closed
9/12/2011	3:23:21 AM	Bypass valve closed
9/12/2011	3:23:21 AM	Helium valve opened
9/12/2011	3:23:21 AM	Bubbler valve opened
9/12/2011	3:23:21 AM	Helium MFC set to  500.000000
9/12/2011	3:23:21 AM	H2 MFC set to  0.000000
9/12/2011	3:23:21 AM	BCl3 MFC set to  0.000000
9/12/2011	3:23:21 AM	PHl3 MFC set to  0.000000
9/12/2011	3:23:21 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:23:21 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:23:21 AM	Tube furnace set to 0
9/12/2011	3:38:21 AM	Helium valve closed
9/12/2011	3:38:21 AM	H2 valve closed
9/12/2011	3:38:21 AM	BCl3 valve closed
9/12/2011	3:38:21 AM	PH3 valve closed
9/12/2011	3:38:21 AM	SiCl4 pre valve closed
9/12/2011	3:38:21 AM	SiCl4 post valve closed
9/12/2011	3:38:21 AM	Main Vac valve closed
9/12/2011	3:38:21 AM	Bypass valve closed
9/12/2011	3:38:21 AM	Bubbler valve closed
9/12/2011	3:38:21 AM	Helium MFC set to  0.000000
9/12/2011	3:38:21 AM	H2 MFC set to  0.000000
9/12/2011	3:38:21 AM	BCl3 MFC set to  0.000000
9/12/2011	3:38:21 AM	PHl3 MFC set to  0.000000
9/12/2011	3:38:21 AM	SiCl4 MFC set to  0.000000
9/12/2011	3:38:21 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	3:38:21 AM	Tube furnace set to 0
9/12/2011	4:38:21 AM	H2 valve closed
9/12/2011	4:38:21 AM	BCl3 valve closed
9/12/2011	4:38:21 AM	PH3 valve closed
9/12/2011	4:38:21 AM	SiCl4 pre valve closed
9/12/2011	4:38:21 AM	SiCl4 post valve closed
9/12/2011	4:38:21 AM	Main Vac valve closed
9/12/2011	4:38:21 AM	Bypass valve closed
9/12/2011	4:38:21 AM	Bubbler valve closed
9/12/2011	4:38:21 AM	Helium valve opened
9/12/2011	4:38:21 AM	Helium MFC set to  500.000000
9/12/2011	4:38:21 AM	H2 MFC set to  0.000000
9/12/2011	4:38:21 AM	BCl3 MFC set to  0.000000
9/12/2011	4:38:21 AM	PHl3 MFC set to  0.000000
9/12/2011	4:38:21 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:38:21 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:38:21 AM	Tube furnace set to 0
9/12/2011	4:38:27 AM	H2 valve closed
9/12/2011	4:38:27 AM	BCl3 valve closed
9/12/2011	4:38:27 AM	PH3 valve closed
9/12/2011	4:38:27 AM	SiCl4 pre valve closed
9/12/2011	4:38:27 AM	SiCl4 post valve closed
9/12/2011	4:38:27 AM	Main Vac valve closed
9/12/2011	4:38:27 AM	Bypass valve closed
9/12/2011	4:38:27 AM	Helium valve opened
9/12/2011	4:38:27 AM	Bubbler valve opened
9/12/2011	4:38:27 AM	Helium MFC set to  500.000000
9/12/2011	4:38:27 AM	H2 MFC set to  0.000000
9/12/2011	4:38:27 AM	BCl3 MFC set to  0.000000
9/12/2011	4:38:27 AM	PHl3 MFC set to  0.000000
9/12/2011	4:38:27 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:38:27 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:38:27 AM	Tube furnace set to 0
9/12/2011	4:43:27 AM	Helium valve closed
9/12/2011	4:43:27 AM	H2 valve closed
9/12/2011	4:43:27 AM	BCl3 valve closed
9/12/2011	4:43:27 AM	PH3 valve closed
9/12/2011	4:43:27 AM	SiCl4 pre valve closed
9/12/2011	4:43:27 AM	SiCl4 post valve closed
9/12/2011	4:43:27 AM	Main Vac valve closed
9/12/2011	4:43:27 AM	Bypass valve closed
9/12/2011	4:43:27 AM	Bubbler valve closed
9/12/2011	4:43:27 AM	Helium MFC set to  0.000000
9/12/2011	4:43:27 AM	H2 MFC set to  0.000000
9/12/2011	4:43:27 AM	BCl3 MFC set to  0.000000
9/12/2011	4:43:27 AM	PHl3 MFC set to  0.000000
9/12/2011	4:43:27 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:43:27 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:43:27 AM	Tube furnace set to 0
9/12/2011	4:43:28 AM	Helium valve closed
9/12/2011	4:43:28 AM	H2 valve closed
9/12/2011	4:43:28 AM	BCl3 valve closed
9/12/2011	4:43:28 AM	PH3 valve closed
9/12/2011	4:43:28 AM	SiCl4 pre valve closed
9/12/2011	4:43:28 AM	SiCl4 post valve closed
9/12/2011	4:43:28 AM	Main Vac valve closed
9/12/2011	4:43:28 AM	Bubbler valve closed
9/12/2011	4:43:28 AM	Bypass valve opened
9/12/2011	4:43:28 AM	Helium MFC set to  0.000000
9/12/2011	4:43:28 AM	H2 MFC set to  0.000000
9/12/2011	4:43:28 AM	BCl3 MFC set to  0.000000
9/12/2011	4:43:28 AM	PHl3 MFC set to  0.000000
9/12/2011	4:43:28 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:43:28 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:43:28 AM	Tube furnace set to 0
9/12/2011	4:44:17 AM	Helium valve closed
9/12/2011	4:44:17 AM	H2 valve closed
9/12/2011	4:44:17 AM	BCl3 valve closed
9/12/2011	4:44:17 AM	PH3 valve closed
9/12/2011	4:44:17 AM	SiCl4 pre valve closed
9/12/2011	4:44:17 AM	SiCl4 post valve closed
9/12/2011	4:44:17 AM	Main Vac valve closed
9/12/2011	4:44:17 AM	Bubbler valve closed
9/12/2011	4:44:17 AM	Bypass valve opened
9/12/2011	4:44:17 AM	Helium MFC set to  0.000000
9/12/2011	4:44:17 AM	H2 MFC set to  0.000000
9/12/2011	4:44:17 AM	BCl3 MFC set to  0.000000
9/12/2011	4:44:17 AM	PHl3 MFC set to  0.000000
9/12/2011	4:44:17 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:44:17 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:44:17 AM	Tube furnace set to 0
9/12/2011	4:45:17 AM	Helium valve closed
9/12/2011	4:45:17 AM	H2 valve closed
9/12/2011	4:45:17 AM	BCl3 valve closed
9/12/2011	4:45:17 AM	PH3 valve closed
9/12/2011	4:45:17 AM	SiCl4 pre valve closed
9/12/2011	4:45:17 AM	SiCl4 post valve closed
9/12/2011	4:45:17 AM	Bypass valve closed
9/12/2011	4:45:17 AM	Bubbler valve closed
9/12/2011	4:45:17 AM	Main Vac valve opened
9/12/2011	4:45:17 AM	Helium MFC set to  0.000000
9/12/2011	4:45:17 AM	H2 MFC set to  0.000000
9/12/2011	4:45:17 AM	BCl3 MFC set to  0.000000
9/12/2011	4:45:17 AM	PHl3 MFC set to  0.000000
9/12/2011	4:45:17 AM	SiCl4 MFC set to  0.000000
9/12/2011	4:45:17 AM	Bypass solenoid MFC set to  0.000000
9/12/2011	4:45:17 AM	Tube furnace set to 0
9/12/2011	7:25:18 AM	Run finished at 7:25 AM
9/12/2011	3:27:54 PM	Main Vac valve closed
9/12/2011	3:27:58 PM	H2 valve opened
9/12/2011	3:28:07 PM	H2 MFC set to  500.000000
9/12/2011	3:28:28 PM	Bypass valve opened
9/12/2011	3:29:26 PM	Bypass valve closed
9/12/2011	3:29:27 PM	Main Vac valve opened
9/12/2011	4:08:50 PM	H2 valve closed
